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http://cio.repositorioinstitucional.mx/jspui/handle/1002/1213| SURFACE MEASUREMENT WITH VERTICAL SUPER-RESOLUTION OF ALUMINUM THIN FILMS BY USING PHASE-SHIFTING INTERFEROMETRY | |
| Ivan Choque | |
| Manuel Servín Guirado | |
| Acceso Abierto | |
| Atribución-NoComercial-SinDerivadas | |
| Surface topography Non-uniform phase shift Phase shifting algorithm Double-frequency ripple distortion Spurious piston Interferogram | |
| "In this dissertation, we present a procedure to measure the phase from non-uniform phase-shifting interferograms in order to estimate the surface topography of an aluminum thin film. Interferograms are acquired from a Michelson interferential microscope, and phase shifts among interferograms are non-uniform because a piezoelectric transducer (PZT), working in open-loop mode, is used as phase shifter. Non-uniform phase shifts generate two types of errors in phase measurements: the double-frequency ripple distortion and the spurious piston. Thus, in order to overcome the aforementioned errors, we design error-correcting and non-iterative phase shifting algorithms (PSAs)." | |
| 2021-05 | |
| Tesis de doctorado | |
| Inglés | |
| León, Guanajuato | |
| Público en general | |
| Choque Aquino, (2021). "Surface measurement with vertical super-resolution of aluminum thin films by using phase-shifting interferometry". Tesis de Doctorado en Ciencias (Óptica). Centro de Investigaciones en Óptica, A.C. León, Guanajuato. 65 pp. | |
| TRATAMIENTO DIGITAL. IMÁGENES | |
| Versión publicada | |
| publishedVersion - Versión publicada | |
| Aparece en las colecciones: | DOCTORADO EN CIENCIAS (ÓPTICA) |
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| Fichero | Descripción | Tamaño | Formato | |
|---|---|---|---|---|
| 17992.pdf | Texto completo / Full text | 2 MB | Adobe PDF | Visualizar/Abrir |